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dc.contributor.authorTanner, Brian K.
dc.contributor.authorAllen, David
dc.contributor.authorWittge, Jochen
dc.contributor.authorDanilewsky, Andreas N.
dc.contributor.authorGaragorri, Jorge
dc.contributor.authorGorostegui-Colinas, Eider
dc.contributor.authorElizalde, M. Reyes
dc.contributor.authorMcNally, Patrick J.
dc.identifier.citationTanner, B. K., Allen, D., Wittge, J., Danilewsky, A. N., Garagorri, J., Gorostegui-Colinas, E., . . . McNally, P. J. (2017). Quantitative imaging of the stress/strain fields and generation of macroscopic cracks from indents in silicon. Crystals, 7(11). doi:10.3390/cryst7110347en_US
dc.description.abstractThe crack geometry and associated strain field around Berkovich and Vickers indents on silicon have been studied by X-ray diffraction imaging and micro-Raman spectroscopy scanning. The techniques are complementary; the Raman data come from within a few micrometres of the indentation, whereas the X-ray image probes the strain field at a distance of typically tens of micrometres. For example, Raman data provide an explanation for the central contrast feature in the X-ray images of an indent. Strain relaxation from breakout and high temperature annealing are examined and it is demonstrated that millimetre length cracks, similar to those produced by mechanical damage from misaligned handling tools, can be generated in a controlled fashion by indentation within 75 micrometres of the bevel edge of 200 mm diameter wafers.en_US
dc.rightsAttribution-NonCommercial-NoDerivs 3.0 Ireland*
dc.subjectX-ray diffraction imagingen_US
dc.subjectRaman spectroscopyen_US
dc.subjectindentation geometryen_US
dc.subjectplastic deformationen_US
dc.subjectcrack generationen_US
dc.subjectplastic deformation strain imagingen_US
dc.titleQuantitative imaging of the stress/strain fields and generation of macroscopic cracks from indents in siliconen_US
dc.contributor.sponsorEuropean Community FP7 STREP project SIDAMen_US
dc.subject.departmenthealthCORE - IT Carlowen_US

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Attribution-NonCommercial-NoDerivs 3.0 Ireland
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 Ireland